Axcelis Technologies, Inc (ACLS) recently announced that it shipped numerous shipments of Purion M SiC medium current implanter to China-based power device chipmakers in the current quarter.The solution will be utilized for 150mm production of silicon carbide power devices for backing up industrial, energy, automotive and other power intensive applications.The Purion M SiC solution provides users with an implanter which has a wide dose and energy range. This makes it highly suitable for early phases of a fa ...