Axcelis Technologies (ACLS) announced today that it has shipped multiple units of its Purion M SiC medium current implanter to numerous top power device chipmakers in China. These systems were sent out in the first quarter.The Purion M SiC medium current implanter will be used in the production of 150mm silicon carbide power devices for automotive, industrial, energy and other high-power applications. The Purion M SiC Power Series platform's adaptable architecture and high-temperature capability allow it to ...